Selective laser ablation today is the most common industrial application of the lasers, because of high processing speed and high quality of processed area. However, hard material ablation (e.g. polycrystalline diamond (PCD) and sapphire) is a challenging task even for lasers. Except femtoecond lasers. Femtosecond laser pulses allows to bypass not only the hardness of materials, but also very high thermal conductivity which may lead to burned regions if other methods are used.